The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 25, 2020

Filed:

Mar. 27, 2017
Applicants:

Shinshu University, Nagano, JP;

Fujikoshi Machinery Corp., Nagano, JP;

Inventors:

Keigo Hoshikawa, Nagano, JP;

Takumi Kobayashi, Nagano, JP;

Etsuko Ohba, Nagano, JP;

Jun Yanagisawa, Nagano, JP;

Assignees:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C30B 11/00 (2006.01); C30B 29/16 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C30B 11/002 (2013.01); C30B 11/003 (2013.01); C30B 11/007 (2013.01); C30B 29/16 (2013.01); H01L 21/02565 (2013.01); H01L 21/02625 (2013.01);
Abstract

The apparatus for producing a gallium oxide crystal relating to the invention contains a vertical Bridgman furnace containing: a base body; a cylindrical furnace body having heat resistance disposed above the base body; a lid member occluding the furnace body; a heater disposed inside the furnace body; a crucible shaft provided vertically movably through the base body; and a crucible disposed on the crucible shaft, heated with the heater, the crucible is a crucible containing a Pt-based alloy, the furnace body has an inner wall that is formed as a heat-resistant wall containing plural ring shaped heat-resistant members each having a prescribed height accumulated on each other, and the ring shaped heat-resistant members each contain plural divided pieces that are joined to each other to the ring shape.


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