The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2020
Filed:
Apr. 26, 2017
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Stephen L. Brown, Yorktown Heights, NY (US);
Bruce B. Doris, Slingerlands, NY (US);
Mark C. Reuter, Montrose, NY (US);
Assignee:
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C23C 14/06 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3414 (2013.01); C23C 14/06 (2013.01);
Abstract
A physical vapor deposition (PVD) target that includes a body composed of material that is reactive with an oxygen containing atmosphere; and a non-reactive cap layer encapsulating at least a sputter surface of the body. The non-reactive cap layer is a barrier obstructing the diffusion of oxygen containing species to the body of the PVD target.