The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2020
Filed:
Sep. 11, 2017
Applicant:
Agc Inc., Chiyoda-ku, JP;
Inventor:
Genki Kobayashi, Tokyo, JP;
Assignee:
AGC Inc., Chiyoda-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
C09G 1/02 (2006.01); C09G 1/16 (2006.01); H01L 21/321 (2006.01); C01B 13/00 (2006.01); C07D 521/00 (2006.01); C08L 71/02 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); C09G 1/16 (2013.01); H01L 21/3212 (2013.01); C01B 13/00 (2013.01); C07D 521/00 (2013.01); C08L 71/02 (2013.01);
Abstract
The present invention relates to a polishing agent including: metal oxide particles; an organic acid having a monodentate ligand; a nonionic polymer; and water, in which the polishing agent has a pH of from 3.0 to 7.0, and the nonionic polymer includes at least one selected from the group consisting of polyglycerin, polyoxyethylene polyglyceryl ether and polyoxypropylene polyglyceryl ether.