The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 18, 2020

Filed:

Mar. 17, 2017
Applicant:

Mitsui Chemicals Tohcello, Inc., Chiyoda-ku, Tokyo, JP;

Inventor:

Eiji Hayashishita, Nagoya, JP;

Assignee:

MITSUI CHEMICALS TOHCELLO, INC., Chiyoda-Ku, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01L 21/683 (2006.01); H01L 21/78 (2006.01); C09J 7/38 (2018.01); C09J 7/29 (2018.01); C09J 7/25 (2018.01); G01R 31/26 (2020.01);
U.S. Cl.
CPC ...
H01L 22/20 (2013.01); C09J 7/255 (2018.01); C09J 7/29 (2018.01); C09J 7/385 (2018.01); G01R 31/26 (2013.01); H01L 21/6836 (2013.01); H01L 21/78 (2013.01); C09J 2203/326 (2013.01); C09J 2433/00 (2013.01); C09J 2467/006 (2013.01); H01L 2221/68327 (2013.01); H01L 2221/68386 (2013.01);
Abstract

A method for manufacturing a semiconductor device of the present invention includes at least following four steps. (A) A step of preparing a structure having an adhesive film having a radiation-curable adhesive resin layer and one or two or more semiconductor chips adhered to the adhesive resin layer ; (B) a step of irradiating the adhesive film with a radiation to crosslink the adhesive resin layer; (C) a step of, after the step (B), confirming the operation of the semiconductor chips in a state of being adhered to the adhesive resin layer; and (D) a step of, after the step (C), picking up the semiconductor chips from the adhesive resin layer.


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