The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10566227 B1

Date of Patent:

Feb. 18, 2020

Filed:

Dec. 08, 2016

Controlling method for a wafer transportation part and a load port part on an efem

Applicant:

Tdk Corporation, Tokyo, JP;

Inventors:

Tsutomu Okabe, Tokyo, JP;

Hidetoshi Horibe, Tokyo, JP;

Assignee:

TDK CORPORATION, Tokyo, JP;

Attorney:

Oliff PLC

Primary Examiner:

Timothy P Kelly

Int. Cl.

CPC ...

H01L 21/677 (2006.01); H01L 21/673 (2006.01); H01L 21/67 (2006.01); H01L 21/02 (2006.01);

U.S. Cl.

CPC ...

H01L 21/67703 (2013.01); H01L 21/02046 (2013.01); H01L 21/67017 (2013.01); H01L 21/67393 (2013.01); H01L 21/67772 (2013.01); H01L 21/67775 (2013.01);

Abstract

A controlling method for a wafer transportation part and a load port part on an EFEM includes a fixing step of fixing a container on an installation stand of the load port part, a first cleaning step of connecting a bottom nozzle of the load port part to multiple bottom holes formed on a bottom surface of the container and introducing a cleaning gas into the container and discharging a gas from the container via the nozzle, a connection step of connecting the container and the transportation room, and a wafer transportation step of transporting the wafer from the container to a processing room via the opening and the transportation room and transporting the wafer from the processing room to the container via the transportation room and the opening.

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