The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2020
Filed:
Sep. 26, 2018
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Inventors:
Assignee:
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 50/00 (2006.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01); B01D 46/00 (2006.01); B01D 46/42 (2006.01); B01D 46/44 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67196 (2013.01); B01D 46/0045 (2013.01); B01D 46/4263 (2013.01); B01D 46/448 (2013.01); H01L 21/67017 (2013.01); H01L 21/67167 (2013.01); H01L 21/67173 (2013.01); H01L 21/67184 (2013.01); H01L 21/67201 (2013.01); H01L 21/67248 (2013.01); H01L 21/67389 (2013.01); H01L 21/67742 (2013.01); H01L 21/67778 (2013.01); B01D 2279/45 (2013.01);
Abstract
The inventive concepts provide apparatuses for transferring a substrate and/or apparatuses for processing a substrate including the same. The substrate transferring apparatus including a chamber, a filter assembly disposed in a chamber to provide external air into the chamber, and an additional assembly including a moisture removing part and a purge gas providing part sequentially stacked on the filter assembly may be provided. The filter assembly may be coupled to the additional assembly.