The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2020
Filed:
Jun. 09, 2017
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Brandon Lee Senn, Molalla, OR (US);
Peter R. Wassei, Newberg, OR (US);
Scott Vernon Wong, Mountain View, CA (US);
Silvia Rocio Aguilar Amaya, San Jose, CA (US);
Todd Anthony Lopes, Livermore, CA (US);
Richard Howard Gould, Fremont, CA (US);
James Donald Keller, Livermore, CA (US);
Steven Edmund Pracko, Fremont, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67017 (2013.01); H01L 21/67739 (2013.01); H01L 21/67778 (2013.01); H01L 21/68707 (2013.01);
Abstract
Disclosed are methods and apparatuses for recirculating gas in an equipment front end module ('EFEM'), including the ability to provide a gas during recirculation and control the gas flow, pressure, and composition of the environment in the EFEM during recirculation.