The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 18, 2020

Filed:

Nov. 21, 2018
Applicant:

Facebook Technologies, Llc, Menlo Park, CA (US);

Inventors:

John Michael Goward, Ayr, GB;

Brian Matthew McSkimming, Redmond, WA (US);

Chloe Astrid Marie Fabien, Seattle, WA (US);

Stephen John Holmes, Glasgow, GB;

Assignee:

Facebook Technologies, LLC, Menlo Park, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01L 21/48 (2006.01); H01L 21/56 (2006.01); C23C 14/34 (2006.01); C23C 14/14 (2006.01);
U.S. Cl.
CPC ...
H01L 21/4853 (2013.01); C23C 14/14 (2013.01); C23C 14/3442 (2013.01); H01L 21/563 (2013.01); H01L 24/81 (2013.01); H01L 2224/81201 (2013.01); H01L 2924/1532 (2013.01); H01L 2924/15717 (2013.01); H01L 2924/15738 (2013.01); H01L 2924/15747 (2013.01);
Abstract

Embodiments relate to forming nanoporous contacts on a receiving substrate without using a seed layer on the receiving substrate. The nanoporous contacts can be used to create bonds between electronic components and the receiving substrate. To form the contacts, a photoresist mask is created on the receiving substrate by a photolithographic process. Through a sputtering process, portions of co-alloy on a depositing substrate are transferred to the receiving substrate with the photoresist mask. The photoresist mask is removed from the receiving substrate. The remaining co-alloy portions on the receiving substrate undergo a de-alloying process to form an array of nanoporous contacts.


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