The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2020
Filed:
Aug. 01, 2014
Applicant:
Cavendish Kinetics, Inc., San Jose, CA (US);
Inventors:
Richard L. Knipe, McKinney, TX (US);
Charles G. Smith, Cambridge, NL;
Roberto Gaddi, s-Hertogenbosch, NL;
Robertus Petrus Van Kampen, S-Hertogenbosch, NL;
Assignee:
CAVENDISH KINETICS, INC., San Jose, CA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01G 5/00 (2006.01); H01G 5/40 (2006.01); H01H 59/00 (2006.01); H01G 5/38 (2006.01); H01G 5/18 (2006.01); H01G 5/16 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01G 5/40 (2013.01); H01G 5/16 (2013.01); H01G 5/18 (2013.01); H01G 5/38 (2013.01); H01H 59/0009 (2013.01); H01L 28/20 (2013.01); H01L 28/40 (2013.01);
Abstract
The present invention generally relates to a MEMS DVC utilizing one or more MIM capacitors. The MIM capacitor may be disposed between the MEMS device and the RF pad or the MIM capacitor may be integrated into the MEMS device itself. The MIM capacitor ensures that a low resistance for the MEMS DVC is achieved.