The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2020
Filed:
Jan. 30, 2017
Dongfang Jingyuan Electron Limited, Beijing, CN;
Zhaoli Zhang, San Jose, CA (US);
Jie Lin, San Jose, CA (US);
Hua-yu Liu, San Jose, CA (US);
Zongchang Yu, San Jose, CA (US);
Dongfang Jingyuan Electron Limited, Beijing, CN;
Abstract
Methods and systems for inspecting integrated circuits are provided. The method includes monitoring an inspection of integrated circuits to receive inspection data including machine data and defect detection results, storing the inspection data in a database, modifying, via the database, at least one of a plurality of recipe files associated with the inspection based on the machine data, and modifying, via the database, at least one of a plurality of software parameters associated with the inspection based on the defect detection results. The system includes a memory including instructions executable by a processor to monitor an inspection of integrated circuits to receive and store inspection data including machine data and defect detection results in a database, modify, via the database, a recipe file associated with the inspection based on the machine data, and modify, via the database, a software parameter associated with the inspection based on the defect detection results.