The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2020
Filed:
Dec. 21, 2018
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventor:
Hidenori Kawata, Chino, JP;
Assignee:
SEIKO EPSON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/1362 (2006.01); H01G 4/005 (2006.01); G09G 3/36 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
G02F 1/136213 (2013.01); G09G 3/3648 (2013.01); H01G 4/005 (2013.01); H01L 28/60 (2013.01);
Abstract
A liquid crystal device as an electro-optical device includes a base substrate as a substrate, a TFT as a transistor, and a holding capacitor, and the holding capacitor includes a first capacitance electrode disposed on the base substrate side and a second capacitance electrode disposed on the first capacitance electrode via a capacitance insulation film, and the first capacitance electrode includes a first electrode layer containing tungsten silicide, a second electrode layer containing silicide of a metal more stabilized through silicidation than tungsten, and a third electrode layer containing silicon stacked one on another.