The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2020
Filed:
Jul. 12, 2018
Ultimems, Inc., New Taipei, TW;
Yee-Chung Fu, Fremont, CA (US);
Han-Tang Su, Taichung, TW;
ULTIMEMS, INC., New Taipei, TW;
Abstract
An electrostatic scanner has a mirror, a first outer slow-scan spring, a second outer slow-scan spring, a plurality of out-of-plane comb assemblies, circuitry for voltage or resistance measurement. Angular positions of a mirror can be determined by changes of resistance of deformed springs located in a leg of the circuitry. The determined angular positions of the mirror can be used for feedback control. The mirror is a one-dimensional mirror to rotate about a first axis or a two-dimensional mirror to rotate about the first axis and a second axis perpendicular to the first axis. In one example, the circuitry is Wheatstone bridge circuitry.