The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 18, 2020

Filed:

Aug. 27, 2018
Applicant:

Nanosurf Ag, Liestal, CH;

Inventor:

Jonathan Adams, Basel, CH;

Assignee:

Nanosurf AG, Liestal, CH;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 20/02 (2010.01); G01Q 60/24 (2010.01); G01Q 10/00 (2010.01);
U.S. Cl.
CPC ...
G01Q 20/02 (2013.01); G01Q 10/00 (2013.01); G01Q 60/24 (2013.01);
Abstract

An atomic force microscope includes a scanner for scanning a probe along at least one translational axis, a stationary light source for generating an incident light beam, a stationary position sensitive detector for detecting a light beam reflected from a cantilever, an optical guiding mechanism for compensating a scanning motion of the probe and configured to guide the incident light beam to a spot on the cantilever and to guide the reflected light beam from the cantilever to the position sensitive detector, wherein the optical guiding mechanism includes at least two optical deflection elements per translational axis arranged to move synchronously with the probe along the respective translational axis, and configured to define an optical path between the light source and the detector for the incident and reflected light beam such that the optical path length is independent of the translation of the probe along the respective translational axis.


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