The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 18, 2020

Filed:

Nov. 07, 2017
Applicant:

Em Microelectronic-marin SA, Marin, CH;

Inventors:

Sylvain Grosjean, Les Fins, FR;

Yonghong Tao, Singapore, SG;

Jean-Michel Daga, Aix-en-Provence, FR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/125 (2006.01); G01P 15/13 (2006.01); G01P 15/18 (2013.01); G01P 21/00 (2006.01);
U.S. Cl.
CPC ...
G01P 15/125 (2013.01); G01P 15/13 (2013.01); G01P 15/131 (2013.01); G01P 15/18 (2013.01); G01P 21/00 (2013.01);
Abstract

A capacitive accelerometer for measuring an acceleration value is provided, including a first and a second electrode; a third mobile electrode arranged therebetween, and forming with the first electrode a first capacitor, and with the second electrode a second capacitor, the third electrode being displaced when the accelerometer is subject to acceleration and generates a capacitance difference value transformable to electrical charges; a first and a second voltage source configured to selectively apply first and second voltages to the first and the second electrodes, respectively, and a third voltage to the third electrode, and to generate electrostatic forces acting on the third electrode, the first, second and/or third voltages applied during electrical charge transfers for collecting the electrical charges to measure the acceleration; and an electrostatic force compensator to compensate for missing electrostatic forces due to a modified charge transfer rate, a compensation amount dependent on the modified rate.


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