The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2020
Filed:
Feb. 14, 2019
Applicant:
The University of British Columbia, Vancouver, CA;
Inventors:
Assignee:
The University of British Columbia, Vancouver, CA;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H04R 31/00 (2006.01); G01N 29/24 (2006.01); H01L 41/09 (2006.01); B81B 3/00 (2006.01); B06B 1/02 (2006.01); G01N 29/06 (2006.01); B81C 1/00 (2006.01); H01L 41/27 (2013.01);
U.S. Cl.
CPC ...
G01N 29/2406 (2013.01); B06B 1/0292 (2013.01); B81B 3/0021 (2013.01); B81C 1/00166 (2013.01); G01N 29/0654 (2013.01); H01L 41/0973 (2013.01); H01L 41/27 (2013.01);
Abstract
Methods and techniques for fabricating layered structures using surface micromachining are described. A sacrificial layer is deposited on a substrate assembly that functions as a bottom electrode. The sacrificial layer is patterned into a first shape. A first polymer-based layer is deposited on the sacrificial layer. A top electrode is patterned on the first polymer-based layer above the sacrificial layer. A second polymer-based layer is deposited on the top electrode such that the top electrode is between the first and second polymer-based layers. The sacrificial layer is etched away to form a cavity under the top electrode.