The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 18, 2020

Filed:

Sep. 28, 2018
Applicant:

Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventors:

Leopold Virot, Voiron, FR;

Vincent Agache, Chereng, FR;

Jean-Marc Fedeli, Saint-Egreve, FR;

Sebastien Hentz, Seyssinet Pariset, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/17 (2006.01); G01G 17/04 (2006.01); G01N 21/25 (2006.01); G02B 6/42 (2006.01); H03H 9/17 (2006.01);
U.S. Cl.
CPC ...
G01N 21/1717 (2013.01); G01G 17/04 (2013.01); G01N 21/255 (2013.01); G02B 6/42 (2013.01); H03H 9/17 (2013.01);
Abstract

The invention is an electromechanical resonator, comprising a fixed portion and an oscillator oscillating at a resonant frequency and comprising a fluidic channel. The channel defines a fluidic circuit, can receive a fluid, and can be deformed at the resonant frequency. The resonator includes a waveguide, defining a photonic circuit, guiding a light wave between an input and an output of the waveguide and being able to be deformed at the resonant frequency. The waveguide input can be connected to a light source and the waveguide output can be connected to a photodetector able to form a signal representative of the light wave propagated by the waveguide towards the photodetector, the light wave being modulated at a frequency dependent on the resonant frequency. A variation in a mass of the fluid, inducing a variation in the resonant frequency, may be detected via the signal formed by the photodetector.


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