The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 18, 2020

Filed:

Apr. 28, 2017
Applicant:

AZ Electronic Materials (Luxembourg) S.a.r.l., Luxembourg, LU;

Inventors:

Yoshio Nojima, Kakegawa, JP;

Masakazu Kobayashi, Kakegawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08F 2/48 (2006.01); C08J 7/18 (2006.01); C09D 183/16 (2006.01); C08G 77/62 (2006.01); C08L 83/16 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C09D 183/16 (2013.01); C08G 77/62 (2013.01); C08L 83/16 (2013.01); H01L 21/02126 (2013.01);
Abstract

[Object] To provide a polysilazane-containing composition for forming a film. In order to form a dense and processable siliceous film, the composition is intended to be employed in a two-step conversion process comprising the steps of: forming a film having a dry surface from the composition provided that the conversion in to the siliceous substance proceeds insufficiently; and then subjecting the film to secondary processing. [Means] The present invention provides a polysilazane-containing film-forming composition comprising a particular amine compound, a polysilazane compound, and a solvent; and the invention also provides a process for forming a siliceous substance. In the process, the composition is applied to coat a substrate and thereafter converted into the siliceous substance. The particular amine compound has two amine groups, and the amine groups have at least one phenyl-substituted hydrocarbon group.


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