The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2020
Filed:
Jan. 13, 2017
David A. Horsley, Albany, CA (US);
Andre Guedes, Lisbon, PT;
Meng-hsiung Kiang, Albany, CA (US);
Richard J. Przybyla, Emeryville, CA (US);
Stefon Shelton, Oakland, CA (US);
David A. Horsley, Albany, CA (US);
Andre Guedes, Lisbon, PT;
Meng-Hsiung Kiang, Albany, CA (US);
Richard J. Przybyla, Emeryville, CA (US);
Stefon Shelton, Oakland, CA (US);
CHIRP MICROSYSTEMS, INC., Berkeley, CA (US);
Abstract
A piezoelectric micromachined ultrasound transducer (PMUT) is disclosed. The PMUT consists of a flexural membrane that is piezoelectrically actuated. These membranes are formed on a first substrate that is bonded to a second substrate. The two substrates are separated by an air gap to allow the PMUT to vibrate. Several methods for joining the two substrates are described.