The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 11, 2020

Filed:

Nov. 25, 2017
Applicant:

Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd., Shenzhen, Guangdong, CN;

Inventors:

Liangfen Zhang, Guangdong, CN;

Yuanjun Hsu, Guangdong, CN;

Jangsoon Im, Guangdong, CN;

Yuanchun Wu, Guangdong, CN;

Poyen Lu, Guangdong, CN;

Boru Yang, Guangdong, CN;

Changdong Chen, Guangdong, CN;

Chuan Liu, Guangdong, CN;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/12 (2006.01); H01L 29/786 (2006.01); H01L 27/092 (2006.01); H01L 21/8238 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7869 (2013.01); H01L 21/823807 (2013.01); H01L 21/823828 (2013.01); H01L 27/092 (2013.01); H01L 27/0922 (2013.01); H01L 27/1203 (2013.01); H01L 27/127 (2013.01); H01L 27/1225 (2013.01); H01L 27/1251 (2013.01);
Abstract

The disclosure provides a hybrid CMOS device and a manufacturing method thereof. The manufacturing method of the hybrid CMOS device according to the disclosure uses a low-temperature polysilicon to prepare an active layer of a PMOS transistor, and simultaneously uses a metal oxide semiconductor to prepare an active layer of an NMOS transistor. The two types of semiconductor materials are used in combination to form a hybrid CMOS device. Compared with the existing method for producing an active layer of the PMOS transistor by using a two-dimensional carbon nanotransister material or an organic semiconductor material, the hybrid CMOS device obtained according to the disclosure has superior electrical properties.


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