logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10559451 B1

PDFFull Text
Date of Patent:
Feb. 11, 2020

Filed:

Feb. 15, 2017

Apparatus with concentric pumping for multiple pressure regimes

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Nikolai Nikolaevich Kalnin, Santa Clara, CA (US);

Toan Q. Tran, San Jose, CA (US);

Dmitry Lubomirsky, Cupertino, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:

Patterson + Sheridan, LLP

Primary Examiner:

Jeffrie R Lund

Assistant Examiner:

Stanislav Antolin

Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); H01L 21/67 (2006.01); F16K 5/12 (2006.01); F16K 51/02 (2006.01); C23C 16/50 (2006.01); B01F 15/02 (2006.01); C23C 16/52 (2006.01); F04D 27/00 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3244 (2013.01); C23C 16/4408 (2013.01); C23C 16/4412 (2013.01); C23C 16/45502 (2013.01); C23C 16/45589 (2013.01); C23C 16/45591 (2013.01); F16K 5/12 (2013.01); F16K 51/02 (2013.01); H01J 37/32009 (2013.01); H01J 37/32633 (2013.01); H01J 37/32715 (2013.01); H01J 37/32834 (2013.01); H01L 21/67017 (2013.01); H01L 21/6719 (2013.01); B01F 15/0264 (2013.01); C23C 16/4409 (2013.01); C23C 16/45587 (2013.01); C23C 16/50 (2013.01); C23C 16/52 (2013.01); F04D 27/00 (2013.01); H01J 37/32623 (2013.01); H01J 2237/334 (2013.01);
Abstract

An exhaust module for a substrate processing apparatus having a body, a pumping ring, and a symmetric flow valve, is disclosed herein. The body has a first and second vacuum pump opening formed therethrough. The pumping ring is positioned in the body over both the first and second vacuum pump openings. The pumping ring includes a substantially ring shaped body having a top surface, a bottom surface, and an opening. The top surface has one or more through holes formed therein, arranged in a pattern concentric with the first vacuum pump opening. The bottom surface has a fluid passage formed therein, interconnecting each of the one or more through holes. The opening is formed in the substantially ring shaped body, substantially aligned with the vacuum pump opening. The symmetric flow valve is positioned in the body over the pumping ring and movable between a raised position and a lowered position.

Find Patent Forward Citations

Loading…