The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 11, 2020

Filed:

Jun. 04, 2018
Applicant:

Ngk Insulators, Ltd., Nagoya-shi, Aichi, JP;

Inventors:

Taku Okamoto, Nagoya, JP;

Yuki Nakayama, Nagoya, JP;

Soichiro Yoshida, Nagoya, JP;

Assignee:

NGK Insulators, Ltd., Nagoya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 27/08 (2006.01); G01N 27/416 (2006.01); H01L 21/66 (2006.01); G01N 27/04 (2006.01); G01D 5/06 (2006.01); G01D 5/241 (2006.01); G01D 11/24 (2006.01); G01D 5/165 (2006.01); G01N 27/406 (2006.01); G01N 27/407 (2006.01);
U.S. Cl.
CPC ...
G01N 27/4163 (2013.01); G01N 27/041 (2013.01); H01L 22/34 (2013.01); G01D 5/06 (2013.01); G01D 5/165 (2013.01); G01D 5/2417 (2013.01); G01D 11/245 (2013.01); G01N 27/4067 (2013.01); G01N 27/4071 (2013.01); G01N 27/4076 (2013.01); H01L 2224/131 (2013.01); H01L 2924/00 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A method of inspecting an electrode provided in a gas sensor element includes the steps of: producing, in advance, a calibration curve representing a relation between an Au maldistribution degree defined based on a ratio of an area of a portion at which Au is exposed on a noble metal particle surface and calculated from a result of XPS or AES analysis on an inspection target electrode, and a predetermined alternative maldistribution degree index correlated with the Au maldistribution degree and acquired in a non-destructive manner from the gas sensor element heated to a predetermined temperature; acquiring a value of the alternative maldistribution degree index for the inspection target electrode of the gas sensor element while the gas sensor element is heated to the predetermined temperature; and determining whether the Au maldistribution degree satisfies a predetermined standard based on the calibration curve and the acquired inspection value.


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