The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 04, 2020

Filed:

Jun. 15, 2017
Applicant:

Samsung Electro-mechanics Co., Ltd., Suwon-si, KR;

Inventors:

Chang Hyun Lim, Suwon-si, KR;

Han Tae Kim, Suwon-si, KR;

Tae Hun Lee, Suwon-si, KR;

Tae Kyung Lee, Suwon-si, KR;

Tae Yoon Kim, Suwon-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/15 (2006.01); H01L 41/09 (2006.01); H01L 41/053 (2006.01); H01L 41/047 (2006.01); H03H 9/10 (2006.01); H03H 9/64 (2006.01); H03H 9/00 (2006.01); H01L 41/277 (2013.01); H03H 9/17 (2006.01); H03H 3/02 (2006.01); H01L 41/23 (2013.01); H01L 41/25 (2013.01); H03H 9/02 (2006.01);
U.S. Cl.
CPC ...
H03H 9/1007 (2013.01); H01L 41/23 (2013.01); H01L 41/25 (2013.01); H01L 41/277 (2013.01); H03H 3/02 (2013.01); H03H 9/009 (2013.01); H03H 9/02118 (2013.01); H03H 9/173 (2013.01); H03H 9/64 (2013.01); H03H 2003/021 (2013.01);
Abstract

A bulk acoustic wave filter device and method thereof includes a first layer forming an air gap together with a substrate, a lower electrode disposed over the first layer, a piezoelectric layer disposed to cover a portion of the lower electrode, an upper electrode disposed over the piezoelectric layer, a frame layer disposed below the upper electrode, and a lower electrode reinforcing layer disposed on the lower electrode, other than portions in which the piezoelectric layer is disposed. The lower electrode reinforcing layer is formed by separating the lower electrode reinforcing layer from the upper electrode or the frame layer upon one of the upper electrode and the frame layer being formed.


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