logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10553780 B1

PDFFull Text
Date of Patent:
Feb. 04, 2020

Filed:

Jun. 18, 2013

Method for producing a polycrystalline ceramic film

Applicant:

Siemens Aktiengesellschaft, München, DE;

Inventors:

Matthias Schreiter, München, DE;

Wolfram Wersing, Bergen, DE;

Assignee:

Siemens Aktiengesellschaft, München, DE;

Attorney:

Lempia Summerfield Katz LLC

Primary Examiner:

Jason Berman

Int. Cl.
CPC ...
C23C 14/34 (2006.01); H01L 41/316 (2013.01); C23C 14/08 (2006.01); C23C 14/54 (2006.01); H01J 37/34 (2006.01); C23C 14/00 (2006.01); C23C 14/06 (2006.01); H03H 9/17 (2006.01);
U.S. Cl.
CPC ...
H01L 41/316 (2013.01); C23C 14/0036 (2013.01); C23C 14/0641 (2013.01); C23C 14/086 (2013.01); C23C 14/542 (2013.01); C23C 14/548 (2013.01); H01J 37/3447 (2013.01); H03H 9/171 (2013.01);
Abstract

The invention relates to a method for producing a polycrystalline ceramic film on a surface () of a substrate (), in which a particle stream is directed onto the surface () and the ceramic film is formed by deposition of the particles onto the surface (), wherein the particle stream is directed by means of a diaphragm onto the surface () along a preferred direction until a first specified layer thickness is reached, the preferred direction and a surface normal of the surface () enclosing a specified angle of incidence. According to the invention, the diaphragm is removed from the particle stream after the specified layer thickness has been reached, and additional particles are directed onto the surface () until a specified second layer thickness has been reached.

Find Patent Forward Citations

Schreiter, Matthias. (2020). Method for producing a polycrystalline ceramic film (U.S. Patent No. 10553780). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10553780

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…