The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2020
Filed:
Jun. 29, 2018
Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd., Shenzhen, Guangdong, CN;
Xingyu Zhou, Guangdong, CN;
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD., Shenzhen, Guangdong, CN;
Abstract
A manufacturing method for a thin-film transistor array substrate is disclosed. The method includes: providing a base substrate; depositing a first metal layer on the base substrate, and patterning to form a gate electrode and a first storage electrode; depositing a gate insulation layer, wherein the gate insulation layer covers the gate electrode and the first storage electrode; depositing a metal oxide semiconductor layer, and patterning to form a metal oxide active layer; depositing a second insulation layer, and patterning to form an etching barrier layer; depositing a second metal layer, and pattering to form a source electrode, a drain electrode and a second storage electrode, wherein the first storage electrode and the second storage electrode are two electrodes of a storage capacitor; depositing a third insulation layer, and patterning to form a passivation layer; and depositing a third metal layer, and patterning to form a pixel electrode.