The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2020
Filed:
Jul. 28, 2017
Applicant:
Thinkon New Technology Japan Corporation, Tokyo, JP;
Inventors:
Atsushi Ikari, Shunan, JP;
Satoshi Fujii, Tokyo, JP;
Assignee:
THINKON NEW TECHNOLOGY JAPAN CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 1/02 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32559 (2013.01); H01J 37/3255 (2013.01); H01J 37/32541 (2013.01); H01J 37/32605 (2013.01); H01L 21/67069 (2013.01); H01J 2237/334 (2013.01);
Abstract
A ring-shaped electrode includes a silicon ring body, and a cover body joined to at least a part of a surface of the ring body via a joining part, and having a better plasma resistance than silicon. The joining part has a heat resistance to withstand a temperature of at least 150° C., melts at 700° C. or below, and contains boron oxide.