The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2020
Filed:
Apr. 24, 2017
Applicant:
Flexterra, Inc., Skokie, IL (US);
Inventors:
Yan Zheng, Skokie, IL (US);
Yan Hu, Chicago, IL (US);
Wei Zhao, New York, NY (US);
Antonio Facchetti, Chicago, IL (US);
Assignee:
Flexterra, Inc., Skoie, IL (US);
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/40 (2006.01); G03F 7/075 (2006.01); G03F 7/038 (2006.01); G03F 7/004 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); G03F 7/32 (2006.01); G03F 7/42 (2006.01); H01L 21/02 (2006.01); H01L 29/786 (2006.01); H01L 51/05 (2006.01);
U.S. Cl.
CPC ...
G03F 7/40 (2013.01); G03F 7/0045 (2013.01); G03F 7/0046 (2013.01); G03F 7/038 (2013.01); G03F 7/0757 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/2004 (2013.01); G03F 7/32 (2013.01); G03F 7/422 (2013.01); H01L 21/02118 (2013.01); H01L 21/02334 (2013.01); H01L 21/02348 (2013.01); H01L 29/7869 (2013.01); H01L 51/0512 (2013.01);
Abstract
The present teachings relate to compositions for forming a negative-tone photopatternable dielectric material, where the compositions include, among other components, an organic filler and one or more photoactive compounds, and where the presence of the organic filler enables the effective removal of such photoactive compounds (after curing, and during or after the development step) which, if allowed to remain in the photopatterned dielectric material, would lead to deleterious effects on its dielectric properties.