The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2020
Filed:
Apr. 22, 2015
The Board of Trustees of the Leland Stanford Junior University, Stanford, CA (US);
Stichting Voor Fundamenteel Onderzoek Der Materie, Utrecht, NL;
Ashwin C. Atre, Stanford, CA (US);
Jennifer A. Dionne, Stanford, CA (US);
Benjamin Brenny, Utrecht, NL;
Toon Coenen, Utrecht, NL;
Albert Polman, Utrecht, NL;
Ashwin C. Atre, Stanford, CA (US);
Jennifer A. Dionne, Stanford, CA (US);
Benjamin Brenny, Utrecht, NL;
Toon Coenen, Utrecht, NL;
Albert Polman, Utrecht, NL;
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY, Stanford, CA (US);
STICHTING VOOR FUNDAMENTEEL ONDERZOEK DER MATERIE, Utrecht, NL;
Abstract
In one aspect, a cathodoluminescence (CL) spectroscopic tomography device includes a sample stage to support a sample. An electron beam source scans an electron beam over the sample to yield light emission by the sample. A reflective element directs the light emission by the sample to a light detector. A controller controls operation of the sample stage, the electron beam source, and the light detector. In one aspect, a CL spectroscopic tomography device includes an electron beam source which directs an electron beam at an object to yield an emission by the object. A detector detects the emission. A controller receives information from the detector related to the detected emission. The controller derives a two-dimensional (2D) CL map from the information related to the detected emission, and derives a three-dimensional (3D) CL tomogram from the 2D CL map.