The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2020
Filed:
Apr. 26, 2018
Applicant:
Invensense, Inc., San Jose, CA (US);
Inventors:
Giacomo Laghi, Milan, IT;
Luca Coronato, Corsico, IT;
Jaakko Ruohio, Cusago, IT;
Roberto Martini, Segrate, IT;
Assignee:
INVENSENSE, INC., San Jose, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/5712 (2012.01); G01C 19/5747 (2012.01);
U.S. Cl.
CPC ...
G01C 19/5712 (2013.01); G01C 19/5747 (2013.01);
Abstract
An exemplary sensor may include a MEMS layer anchored to a cap and a substrate by anchoring portions of the MEMS layer. A suspended spring-mass system may include springs, at least one rigid mass, and at least one movable mass. The anchoring springs may be torsionally compliant about one or more axes and coupled to the rigid mass such that forces imparted by the anchoring portions are not transmitted to the movable mass.