The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2020
Filed:
Apr. 29, 2016
Applicant:
Adarza Biosystems, Inc., West Henrietta, NY (US);
Inventors:
Christopher C. Striemer, West Henrietta, NY (US);
Jared A. Carter, West Henrietta, NY (US);
Wade Campney, West Henrietta, NY (US);
Assignee:
ADARZA BIOSYSTEMS, INC., St. Louis, MO (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01L 21/67 (2006.01); G01B 11/06 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
G01B 11/0625 (2013.01); H01L 21/67023 (2013.01); H01L 21/67075 (2013.01); H01L 21/67086 (2013.01); H01L 21/67253 (2013.01); H01L 22/12 (2013.01); G01B 2210/56 (2013.01); H01L 21/673 (2013.01); H01L 21/67057 (2013.01);
Abstract
This present disclosure generally relates to devices, methods, and systems for producing large numbers of SiOcoated silicon chips with uniform film thickness controlled to angstrom and sub angstrom levels. The disclosure further relates to etching plates configured for receiving a plurality of chips mounted thereon.