The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2020
Filed:
Jan. 05, 2017
Applicant:
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Inventor:
Kakeru Takahashi, Tokyo, JP;
Assignee:
SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F04B 37/08 (2006.01); B01D 8/00 (2006.01);
U.S. Cl.
CPC ...
F04B 37/08 (2013.01); B01D 8/00 (2013.01);
Abstract
A cryopump includes a second cryopanel unit which is thermally connected to a second cooling stage of a cryocooler, a radiation shield which includes a shield main opening, a shield side opening, and a shield bottom opening, and a cryopump housing having a housing bottom portion which faces the shield bottom opening. A dimension of the shield bottom opening is larger than a distance from the second cryopanel unit to the housing bottom portion.