The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 04, 2020

Filed:

Sep. 07, 2017
Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

Juan Alejandro Herbsommer, Allen, TX (US);

Simon Joshua Jacobs, Lucas, TX (US);

Benjamin Stassen Cook, Addison, TX (US);

Adam Joseph Fruehling, Garland, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); H01L 23/08 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00047 (2013.01); B81C 1/00539 (2013.01); H01L 21/76898 (2013.01); H01L 23/08 (2013.01); B81B 2203/0315 (2013.01);
Abstract

An illustrate method (and device) includes etching a cavity in a first substrate (e.g., a semiconductor wafer), forming a first metal layer on a first surface of the first substrate and in the cavity, and forming a second metal layer on a non-conductive structure (e.g., glass). The method also may include removing a portion of the second metal layer to form an iris to expose a portion of the non-conductive structure, forming a bond between the first metal layer and the second metal layer to thereby attach the non-conductive structure to the first substrate, sealing an interface between the non-conductive structure and the first substrate, and patterning an antenna on a surface of the non-conductive structure.


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