The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2020
Filed:
Dec. 05, 2018
Applicant:
Robert Bosch Gmbh, Stuttgart, DE;
Inventor:
Christoph Kaiser, Reutlingen, DE;
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); H01L 21/60 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0072 (2013.01); B81B 3/0094 (2013.01); B81C 1/00801 (2013.01); H01L 21/0259 (2013.01); B81B 2203/01 (2013.01); B81C 2201/014 (2013.01); B81C 2201/0132 (2013.01); H01L 2021/60285 (2013.01);
Abstract
A micromechanical structure includes a fixing point, a silicon spring, and a movable part. The silicon spring is connected to the fixing point at a first end and to the movable part at a second end. At least one copper circuit trace is situated on the silicon spring and extends at least from the first end to the second end. The copper circuit trace has a layer structure including a plurality of contiguous copper layers.