The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 28, 2020

Filed:

Sep. 20, 2018
Applicants:

New Power Plasma Co., Ltd., Gyeonggi-do, KR;

Research & Business Foundation Sungkyunkwan University, Gyeonggi-do, KR;

Inventors:

Seung Hee Ryu, Gyeonggi-do, KR;

Chang Seob Lim, Gyeonggi-do, KR;

Hong Kweon Moon, Gyeonggi-do, KR;

Won Yong Sung, Gyeonggi-do, KR;

Geun Wan Koo, Gyeonggi-do, KR;

Byoung Kuk Lee, Gyeonggi-do, KR;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/24 (2006.01); H01F 27/24 (2006.01); H01J 37/32 (2006.01); H05H 1/36 (2006.01); G01R 21/06 (2006.01); G01R 23/02 (2006.01); H02M 5/42 (2006.01); H05H 1/46 (2006.01); H02M 3/155 (2006.01);
U.S. Cl.
CPC ...
H05H 1/36 (2013.01); G01R 21/06 (2013.01); G01R 23/02 (2013.01); H01F 27/24 (2013.01); H01J 37/32009 (2013.01); H02M 3/155 (2013.01); H02M 5/42 (2013.01); H05H 1/46 (2013.01);
Abstract

Provided is a resonant network for plasma power supply, which is connected between a power supply unit and an output unit. The resonant network includes a resonant inductor connected in series with the power supply unit, a resonant capacitor connected in parallel with the output unit and connected in series with the resonant inductor, and a passive element connected in series with the output unit and the resonant inductor and connected in parallel with the resonant capacitor.


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