The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2020
Filed:
Sep. 29, 2016
Qorvo Us, Inc., Greensboro, NC (US);
Alireza Tajic, Winter Springs, FL (US);
Paul Stokes, Orlando, FL (US);
Robert Aigner, Ocoee, FL (US);
Qorvo US, Inc., Greensboro, NC (US);
Abstract
Bulk Acoustic Wave (BAW) resonators with a Border (BO) ring and an inner ring are provided. One BAW resonator includes a bottom electrode, a piezoelectric layer over the bottom electrode, and a top electrode over the piezoelectric layer in which an active region is formed where the top electrode and the bottom electrode overlap. The top electrode includes a BO ring extending about a periphery of the active region and an inner ring inside of and spaced apart from the BO ring. The BO ring is a mass loading of a first portion of the top electrode and the inner ring is a mass unloading of a second portion of the top electrode. Various methods include fabricating a BAW resonator with a top electrode including a mass loading BO ring and a mass unloading inner ring spaced apart from the mass loading BO ring.