The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2020
Filed:
Dec. 21, 2015
Tdk Corporation, Tokyo, JP;
Gino Rocca, Copenhagen, DK;
Tomasz Hanzlik, Szczecin, PL;
TDK CORPORATION, Tokyo, JP;
Abstract
A MEMS capacitive sensor is disclosed. In an embodiment a MEMS capacitive sensor includes a capacitor having a variable capacitance, wherein the capacitor includes a backplate and a membrane being separated from each other by a variable distance, wherein the capacitor is arranged on a substrate, an output terminal configured to provide an output signal, wherein the output terminal is connected to the backplate, a bias voltage input terminal configured to apply a bias voltage, wherein the bias voltage input terminal is connected to the membrane and a supply voltage input terminal configured to apply a supply voltage, wherein the supply voltage input terminal is connected to the substrate, wherein the MEMS capacitive sensor is configured to generate a level of the output signal in dependence on the distance between the membrane and the backplate.