The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2020
Filed:
Dec. 07, 2015
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Kirankumar Savandaiah, Bangalore, IN;
Ryan Hanson, Cupertino, CA (US);
Ruxiao An, Palo Alto, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/35 (2006.01); H01J 37/34 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3411 (2013.01); H01J 37/32431 (2013.01); H01J 37/32477 (2013.01); H01J 37/32495 (2013.01); H01J 37/32504 (2013.01); H01J 37/32513 (2013.01); H01J 37/32522 (2013.01); H01J 37/34 (2013.01); H01J 37/3441 (2013.01); H01J 37/3447 (2013.01);
Abstract
Embodiments of process kit shields and process chambers incorporating same are provided herein. In some embodiments, a one-piece process kit shield includes a cylindrical body having an upper portion and a lower portion; a heat transfer channel extending through the upper portion; and a cover ring section extending radially inward from the lower portion.