The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2020
Filed:
Jul. 30, 2018
Horiba Stec, Co., Ltd., Kyoto-shi, Kyoto, JP;
Tadahiro Yasuda, Irvine, CA (US);
Bill White, Irvine, CA (US);
Patrick Lowery, Irvine, CA (US);
Maximilian Gundlach, Irvine, CA (US);
Ryan Owens, Irvine, CA (US);
HORIBA STEC, Co., Ltd., Kyoto-shi, Kyoto, JP;
Abstract
Provided is a flow rate control apparatus that includes a flow restrictor, a downstream side valve, a downstream side pressure sensor, first and second flow rate calculators, and a flow rate controller. The downstream side valve is disposed downstream of the flow restrictor in a flow path. The downstream side pressure sensor measures a pressure between the flow restrictor and the downstream side valve. The first flow rate calculator calculates a first flow rate of fluid flowing through the flow restrictor. The second flow rate calculator calculates a second flow rate of fluid flowing out of the downstream side valve on the basis of the first flow rate and the temporal variation in downstream side pressure measured by the downstream side pressure sensor. The flow rate controller controls the downstream side valve on the basis of a set flow rate and the second flow rate.