The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2020
Filed:
Nov. 30, 2018
Yukinori Ikegawa, Milpitas, CA (US);
Yoshitaka Sasaki, Los Gatos, CA (US);
Hiroyuki Ito, Milpitas, CA (US);
Shigeki Tanemura, Milpitas, CA (US);
Hironori Araki, Milpitas, CA (US);
Yukinori Ikegawa, Milpitas, CA (US);
Yoshitaka Sasaki, Los Gatos, CA (US);
Hiroyuki Ito, Milpitas, CA (US);
Shigeki Tanemura, Milpitas, CA (US);
Hironori Araki, Milpitas, CA (US);
HEADWAY TECHNOLOGIES, INC., Milpitas, CA (US);
Abstract
A manufacturing method for a waveguide includes forming a core including a first and a second layer. The first layer has a top surface including a first region opposed to a bottom surface of the second layer, and a second region not opposed to the bottom surface of the second layer. Forming the core includes a step of forming an initial first layer, an etching stopper layer on the second region of the top surface of the initial first layer, an initial second layer on the initial first layer and the etching stopper layer, and a step of etching the initial second layer until the etching stopper layer is exposed, to make the initial second layer into the second layer. A difference between the refractive index of the etching stopper layer and the core is smaller than or equal to 10% of the refractive index of the core.