The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2020
Filed:
Oct. 18, 2017
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventor:
Toshiyuki Kamiya, Fujimi, JP;
Assignee:
Seiko Epson Corporation, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 1/16 (2006.01); G01L 5/22 (2006.01); H01L 41/113 (2006.01); H01L 41/18 (2006.01);
U.S. Cl.
CPC ...
G01L 5/167 (2013.01); G01L 1/16 (2013.01); G01L 1/165 (2013.01); H01L 41/1132 (2013.01); H01L 41/18 (2013.01);
Abstract
A force detection sensor includes a base member having a first surface subjected to an external force and a second surface having a normal direction different from the first surface, and an inter-digital electrode placed on the second surface. Further, the second surface deforms when the first surface is subjected to the force. Furthermore, the second surface includes a part formed by a surface of a piezoelectric material and the inter-digital electrode is placed in the part. The piezoelectric material is quartz crystal. The second surface is parallel to an electrical axis of the quartz crystal.