The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2020
Filed:
Jul. 01, 2016
Applicant:
Lockheed Martin Corporation, Bethesda, MD (US);
Inventors:
Randall M. Stoltenberg, Palo Alto, CA (US);
Alfred A. Zinn, Palo Alto, CA (US);
Assignee:
Lockheed Martin Corporation, Bethesda, MD (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C22B 3/00 (2006.01); B23K 35/26 (2006.01); B22F 1/00 (2006.01); B82Y 30/00 (2011.01); H05G 2/00 (2006.01);
U.S. Cl.
CPC ...
C22B 25/04 (2013.01); B23K 35/262 (2013.01); B22F 1/0018 (2013.01); B82Y 30/00 (2013.01); H05G 2/00 (2013.01);
Abstract
A method includes providing nanoparticles having a tin coating surrounding a metal nucleus, such as copper. The nucleus forms first and acts as a seed growing into nanoparticles with a tin coating and a nucleus. The nanoparticles are at least partially vaporized, thereby producing vaporized tin ions. An emission of extreme ultraviolet (EUV) radiation is generated from the vaporized tin ions.