The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2020
Filed:
Apr. 23, 2015
Applicant:
Epcos Ag, München, DE;
Inventor:
Wolfgang Pahl, München, DE;
Assignee:
TDK Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/053 (2006.01); B81B 7/02 (2006.01); H01L 41/113 (2006.01);
U.S. Cl.
CPC ...
B81B 7/02 (2013.01); H01L 41/053 (2013.01); H01L 41/1132 (2013.01); B81B 2201/0264 (2013.01); B81B 2201/0278 (2013.01); B81B 2201/0292 (2013.01); B81B 2207/012 (2013.01); B81B 2207/07 (2013.01); B81B 2207/092 (2013.01); B81B 2207/096 (2013.01); B81B 2207/097 (2013.01);
Abstract
A sensor component having a MEMS sensor and an ASIC for one sensor function each. A base element, a wall element in the form of a frame and a cover together enclose a cavity of a housing. The MEMS sensor is mounted inside the cavity on the base element of the housing. The ASIC has an active sensor surface and is mounted on or under the cover or is embedded in the cover. Electrical external contacts for the MEMS sensor and ASIC are provided on an external surface of the housing. The cavity has at least one opening or bushing.