The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 21, 2020

Filed:

Mar. 14, 2017
Applicant:

Xaar Technology Limited, Cambridge, GB;

Inventors:

Peter Mardilovich, Cambridge, GB;

Song-Won Ko, Cambridge, GB;

Susan Trolier-McKinstry, University Park, PA (US);

Trent Borman, University Park, PA (US);

Assignee:

Xaar Technology Limited, Cambridge, GB;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/14 (2006.01); H01L 41/318 (2013.01); H01L 41/08 (2006.01); H01L 41/187 (2006.01); B41J 2/16 (2006.01); H01L 41/047 (2006.01); H01L 41/29 (2013.01);
U.S. Cl.
CPC ...
H01L 41/318 (2013.01); B41J 2/14233 (2013.01); B41J 2/161 (2013.01); B41J 2/1642 (2013.01); H01L 41/0805 (2013.01); H01L 41/1876 (2013.01); B41J 2002/14266 (2013.01); H01L 41/0477 (2013.01); H01L 41/29 (2013.01);
Abstract

A piezoelectric thin film element comprising a first electrode, a second electrode and one or more piezoelectric thin films there between wherein the first electrode is a platinum metal electrode having an average grain size greater than 50 nm and wherein a piezoelectric thin film adjacent the platinum metal electrode comprises a laminate having a plurality of piezoelectric thin film layers wherein a piezoelectric thin film layer contacting the platinum metal electrode comprises lead zirconate titanate (PZT) of composition at or about PbZrTiOwhere 0<x≤0.60 and has a degree of pseudo cubic {100} orientation greater than or equal to 90%.


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