The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2020
Filed:
Jul. 23, 2018
Toshiba Memory Corporation, Minato-ku, JP;
Genki Kawaguchi, Yokkaichi, JP;
Masanari Fujita, Yokkaichi, JP;
Hideki Inokuma, Yokkaichi, JP;
Osamu Matsuura, Kuwana, JP;
Takeshi Imamura, Yokkaichi, JP;
Hideo Wada, Yokkaichi, JP;
Makoto Watanabe, Oita, JP;
Hajime Kaneko, Yokkaichi, JP;
Kenichi Fujii, Yokkaichi, JP;
Takanobu Itoh, Yokkaichi, JP;
Toshiba Memory Corporation, Minato-ku, JP;
Abstract
According to one embodiment, it includes a stacked body including N-number of layers (N is an integer of 2 or more) stacked on a semiconductor substrate, opening portions penetrating the stacked body in a stacking direction, columnar bodies respectively disposed in the opening portions, and a slit dividing M-number of layers (M is an integer of 1 or more and (N−2) or less) of the stacked body in a horizontal direction from above, wherein the slit is formed with lateral surfaces respectively having a spatial periodicity in a horizontal plane.