The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 21, 2020

Filed:

Jun. 18, 2018
Applicant:

Suss Microtec Photonic Systems Inc., Corona, CA (US);

Inventors:

Yanrong Yuan, Irvine, CA (US);

John Bjorkman, Costa Mesa, CA (US);

Paul Ferrari, Mission Viejo, CA (US);

Jeff Hansen, Corona, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 17/08 (2006.01); G02B 7/09 (2006.01); G02B 17/00 (2006.01); G03F 7/20 (2006.01); G02B 7/10 (2006.01); H01L 21/68 (2006.01); G03B 27/42 (2006.01); G02B 15/177 (2006.01); G02B 13/26 (2006.01);
U.S. Cl.
CPC ...
G02B 17/0896 (2013.01); G02B 7/09 (2013.01); G02B 7/102 (2013.01); G02B 17/008 (2013.01); G02B 17/0892 (2013.01); G03F 7/70191 (2013.01); G03F 7/70225 (2013.01); G03F 7/70258 (2013.01); H01L 21/682 (2013.01); G02B 13/26 (2013.01); G02B 15/177 (2013.01);
Abstract

Techniques are disclosed for magnification compensation and/or beam steering in optical systems. An optical system may include a lens system to receive first radiation associated with an object and direct second radiation associated with an image of the object toward an image plane. The lens system may include a set of lenses, and an actuator system to selectively adjust the set of lenses to adjust a magnification associated with the image symmetrically along a first and a second direction. The lens system may also include a beam steering lens to direct the first radiation to provide the second radiation. In some examples, the lens system may also include a second set of lenses, where the actuator system may also selectively adjust the second set of lenses to adjust the magnification along the first or the second direction. Related methods are also disclosed.


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