The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 21, 2020

Filed:

Jul. 26, 2017
Applicant:

Melexis Technologies SA, Bevaix, CH;

Inventors:

Jan-Willem Burssens, Tielt-Winge, BE;

Robert Racz, Zug, CH;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 33/07 (2006.01); G01R 33/02 (2006.01); G01R 33/09 (2006.01); H01F 10/32 (2006.01); H01F 41/14 (2006.01); H01L 43/06 (2006.01);
U.S. Cl.
CPC ...
G01R 33/072 (2013.01); G01R 33/02 (2013.01); G01R 33/091 (2013.01); H01F 10/32 (2013.01); H01F 41/14 (2013.01); H01L 43/06 (2013.01);
Abstract

A sensor device comprising a substrate, the substrate comprising one or more magnetic sensor elements; a first elastomeric material on top of the one or more magnetic sensor elements; a magnetic layer comprising a soft magnetic metal alloy deposited by electroplating or by sputtering on top of the first elastomeric material; and optionally a second elastomeric material on top of the magnetic layer. The substrate may be a CMOS device with IMC encapsulated between two polyimide layers. The magnetic material may be annealed at 250° C. to 295° C. using a constant or rotating magnetic field having a strength in the range from 100 to 300 mTesla. The soft magnetic alloy is arranged as Integrated Magnetic Concentrator (IMC).


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