The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 21, 2020

Filed:

Sep. 30, 2018
Applicant:

Agilent Technologies, Inc., Santa Clara, CA (US);

Inventors:

Matthew Kole, Santa Clara, CA (US);

Andrew Ghetler, San Jose, CA (US);

Assignee:

Agilent Technologies, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/552 (2014.01); G01B 11/24 (2006.01);
U.S. Cl.
CPC ...
G01N 21/552 (2013.01); G01B 11/2441 (2013.01);
Abstract

An ATR scanning system and a method for positioning a specimen against the reflective surface of an ATR objective are disclosed. The scanning system includes an ATR objective, a controller, a stage, and a height profiler. The controller forms an image of the reflective surface. The stage moves a specimen in a direction toward the reflective surface at a speed determined by the controller. The height profiler measures a minimum distance between the specimen and the reflective surface as the z-axis stage moves the specimen at a first speed. When the specimen is a predetermined distance from the reflective surface of the ATR objective, the controller causes the z-axis stage to move toward the reflective surface at a second speed while forming approach images of the reflective surface to determine if the specimen is in contact with the reflective surface.


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