The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2020
Filed:
May. 08, 2019
Olympus Corporation, Tokyo, JP;
Mayumi Odaira, Akiruno, JP;
Yoshimasa Suzuki, Kawasaki, JP;
OLYMPUS CORPORATION, Tokyo, JP;
Abstract
A sample shape measuring apparatus includes a light source unit, an illumination optical system, a detection optical system, a light detection element, and a processing apparatus. A scanning unit relatively moves a light spot and the sample. Illumination light applied to the sample is transmitted through the sample, and light transmitted through the sample is incident on the detection optical system. The light detection element receives light. The illumination optical system or the detection optical system includes an optical member. The processing apparatus obtains a quantity of light based on a received light, calculates at least one of a difference and a ratio between the quantity of light and a reference quantity of light, calculates an amount of tilt at a surface of the sample, and calculates a shape of the sample from the amount of tilt.