The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2020
Filed:
Sep. 14, 2015
Applicant:
Korea Institute of Industrial Technology, Cheonan-si, Chungcheongname-do, KR;
Inventors:
Ho Nyun Lee, Incheon, KR;
Hyun Jong Kim, Seoul, KR;
Assignee:
Korea Institute of Industrial Technology, Cheonan-si, Chungcheongnam-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/24 (2006.01); C23C 14/14 (2006.01); C23C 14/08 (2006.01); C23C 14/00 (2006.01); C23C 14/58 (2006.01);
U.S. Cl.
CPC ...
C23C 14/08 (2013.01); C23C 14/0021 (2013.01); C23C 14/14 (2013.01); C23C 14/24 (2013.01); C23C 14/5806 (2013.01);
Abstract
A method for manufacturing a metal or metal oxide porous thin film having a three-dimensional open-network structure by controlling its pore size through a dry process is provided. The film can be used in a gas sensor, a biosensor, a battery capacitor, a fuel cell, a solar cell, a chemical catalyst, or an antibacterial filter.