The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2020
Filed:
Jul. 09, 2018
Hitachi, Ltd., Chiyoda-ku, Tokyo, JP;
Misuzu Sagawa, Tokyo, JP;
Atsushi Isobe, Tokyo, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
In a calculator in a MEMS manufacturing system, a stage control unit inclines a stage based on a stage anglesetting a stage inclination angle and a stage angleof the inclination angle different from the stage angle. A stage-angle calculation unit calculates the stage inclination angles from first and second images acquired by a SEM apparatus when the stage control unit sets the stage at the stage anglesand. A 3D-data creation unit creates three-dimensional device data from a third image that is a device image acquired when the stage is set at the stage angleand a fourth image that is a device image acquired when the stage is set at the stage angle. When the three-dimensional device data is created, a correction value calculated from the stage anglesandand the first and second images is used.