The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2020
Filed:
Jan. 22, 2018
Applied Materials, Inc., Santa Clara, CA (US);
Rajeev Bajaj, Fremont, CA (US);
Kasiraman Krishnan, Milpitas, CA (US);
Mahendra C. Orilall, Downingtown, PA (US);
Daniel Redfield, Morgan Hill, CA (US);
Fred C. Redeker, Fremont, CA (US);
Nag B. Patibandla, Pleasanton, CA (US);
Gregory E. Menk, Pleasanton, CA (US);
Jason G. Fung, Santa Clara, CA (US);
Russell Edward Perry, Pleasanton, CA (US);
Robert E. Davenport, Los Gatos, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Embodiments of the disclosure generally provide polishing pads includes a composite pad body and methods for forming the polishing pads. One embodiment provides a polishing pad including a composite pad body. The composite pad body includes one or more first features formed from a first material or a first composition of materials, and one or more second features formed from a second material or a second composition of materials, wherein the one or more first features and the one or more second features are formed by depositing a plurality of layers comprising the first material or first composition of materials and second material or second composition of materials.